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Our products WAFERMAP and PANELMAP can import data files from various metrology tools such as ellipsometers, thickness gauges and four point probes. The imported data can then be visualized or printed as line scans, contour plots, 2D or 3D plots or as a histogram.

We want to add many more import options for semiconductor (and perhaps other industries such as pharmaceutical or chemical) metrology equipment.

We would like to get information on new or already existing metrology equipment and its data file formats. If you send us precise and clear information on the metrology equipment supplier, model name and the used data file format together with some example data files you will earn a US $ 100 Reward in case we add this file format to the import options of WAFERMAP or PANELMAP.

Import functions in WAFERMAP are already existing for the following metrology equipment: 4 Dimensions, AIT CMS, AMS SRD/MRD, CDE ResMap, FILMetrics, KLA Tencor RS 100, KLA Tencor F5 Ellipsometer, Nanophotonics, Napson WS300, Nicolet, Plasmos, Prometrix Rs, Prometrix UV-1250, QC Solutions, Rigaku, Rudolph, Rudolph Metapulse, Semitek, Sentech, SOPRA SE, OMS, OMT, Thermawave Optiprobe and Thermaprobe, TWIN.

Import functions in PANELMAP are already existing for the following metrology equipment: E+H, Filmetrics.

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