General

- Advanced xml-based Boin multi-column multi-panel file format
- Loading of multiple columns and panels at once
- Configurable 1D- (line scan), 2D- (contour or colored), 3D- (solid or wire frame), 3D bar chart-, value-, and sigma range plots
- Multicolor contour plot
- Statistical analysis (histogram, calculation of mean, standard deviation, max, min, etc.)
- Import functions for data from different metrology tools (AIT CMT 5000, E+H, Filmetrics, GP-Solar, OMT)
- Import of data from metrology tools that directly write the PANELMAP file format (E+H, ISIS Optronics)
- Other import functions (e.g. ASCII files)
- Export of *.jpg and *.bmp files
- Export into *.html file format
- Definition of any site pattern using a graphic editor
- Automatic generation of Cartesian or circular site patterns
- Extensive on-line help and HTML based user manual

SPC

- Trend charts
- Trend lists
- X-Y-plots of statistical values
- Global statistics ("All points, all panels")
- Browser
- Trend charts and lists can be sorted by any criterion (date & time, mean, max, min, std. dev. etc.)
- Stacked maps
- Operations with files
- Direct import of measurement files into the SPC tool

Operations

- Global operations (add, subtract, divide, square, square root, etc.)
- 1st and 2nd derivative of a map
- File compare operations (add, multiply, ratio, average, etc.)
- File operations are applicable to files with different site distributions
- Shift (X and Y direction) and rotation of grids
- Mirroring of maps along the X and Y axis
- Multiple files can be open simultaneously
- Multiple views of a single file can be selected and displayed simultaneously
- Multiple views can be printed on a single sheet, printouts are configurable including company logo
- Transformation of grids (Cartesian, circular) keeping same measurement feature
- Merge data of different files (e.g. two measurements of one panel)
- Sigma Sorting Filter (1, 2, 3 sigma)
- Interpolation of sites

Communication/ Linking

- Inter-application communication via DCOM (ActiveX server)
- Advanced control of WAFERMAP can be achieved via DDE linking to another application depending on OS
 


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Home Page: http://www.boin-gmbh.com