2D Plot   2D Plot

The color scale on the right side of the plot shows the range of values for each color. The ranges are defined depending on the maximum and minimum values for the specific panel. The plot resolution, the marking of sites and the background color for this specific plot can be defined and changed by using the "Plot Options" button.
 
  3D Plot   3D Plot

For the 3D plot, the user can specify the resolution in the x and y directions independently. The unit for these entries is mm. In addition, the user can define the scaling of the z direction of the plot, which represents the height of the values. The user can change the rotation and the inclination of the plot grid.
 
  Contour Plot   2D Contour Plot

A 2D contour plot shows lines of equal values. The distance between the lines is determined by a user defined interval which usually is specified as a percent of the mean value. The plot resolution, the interval, the line colors and the foreground and background colors for this specific plot can be defined and changed by using the "Plot Options" button.
 
  3D Bar Plot   3D Bar Plot

This plot displays the measured values on the panel as bars. The user can specify the width and depth of the bars independently. The unit for these entries is mm. In addition, the user can define the scaling in the Z direction, which represents the height of the values. The user can also change the rotation and the inclination of the panel in the plot.
 
  Line Scan   Line Scan

This plot displays a cut through the measured values on the panel. The user can specify the line direction using either 1 point and an angle (dynamically changeable) or 2 points. Markers can be switched on showing measurement values lying directly on this line scan.
 
  2D Value Plot   2D Value Plot

This plot displays all measured values on the panel using color coding. The user can specify the colors.
 
  SPC Browser   SPC Browser

PANELMAP includes a Browser in the SPC tool. This Browser allows the user to quickly preview multiple data sets. In addition, it is useful for comparison and drift analysis of production tools. All files that are loaded into the SPC tool will be displayed as thumbnail 2D color or contour maps sorted by their file name. The file name will be shown above the thumbnails. The size of the thumbnails can be adjusted.
 
  Trend Chart   SPC Trend Chart

PANELMAP includes a Trend Chart in the SPC Tool. This Trend Chart allows for statistical analysis of multiple data sets. In addition, it is useful for comparison and drift analysis of production tools. All files that are loaded into the SPC tool will be displayed. The user can define the displayed criterion in the selection area below the chart. The selections include the numerical values mean, maximum, minimum, standard deviation, range, high-low variation, and number of sites. Additionally, PANELMAP allows for the selection of the measurement value at one of 5 predefined points on the panel. These points may be actual measurement sites, or they can be an interpolated location. This PANELMAP option allows for the comparison of the same site for all loaded panels (e.g. the site in the center of the panel).

The user can also choose the sorting criterion. This criterion can be a numerical value or some of the non-numerical values (e.g. the "Fab name" or the "Equipment info" from the remarks). One use of this technique is to sort the data by tool characteristics.

The upper and lower control limits (UCL, LCL), and the sigma ranges (1, 2, 3 sigma) are shown as horizontal lines on the plot if they are located within the plotted range.

On the right side of the plot area, the statistical analysis of the displayed value (Special Measure Statistics) is given in the form of a histogram. If for example, the displayed criterion is the mean, the histogram will show the distribution of the mean values of all selected panels.

Single clicking on any marker of a displayed panel brings up the Single Panel Statistics for this panel on the left side of the screen.
 

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