Metrology Software

The new 4.0 version of WAFERMAP is available from Manuela Boin Scientific Software, Tomerdingen, Germany. The software allows import of data files from different metrology tools such as ellipsometer and four point probes. The data can be visualized by contour plots, three-dimensional plots, line scans, histograms and others.

New features of the software include rotation, shift and mirroring of the grid. For simulation of wafer rotation in deposition or rapid thermal processing equipment it is possible to average radial zones. A number of operations between data files with different number and arrangement of sites can be carried out, e.g. addition, subtraction, multiplication and division of 2 files. Single files can be edited and both linear and non-linear functions can be applied in order to manipulate the data. SPC tools such as trend chart, global statistics and a file browser are implemented.

Manuela Boin Scientific Software has already sold more than 50 licenses of WAFERMAP to IC manufacturers, equipment vendors and universities.

A shareware version of the program can be downloaded at http://home.t-online.de/home/manuela.boin.

Contact:

Dr. Manuela Boin
E-Mail: manuela.boin@t-online.de
Tel: +49 (0) 7348-928233
Fax: +49 (0) 7348-928234
 

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Home Page: http://www.boin-gmbh.com