Version 3.54
Release date: Sept 21, 2014
Changes:
- Update of file name extension in Save for WAFERMAP DDE connection
 

Version 3.53
Release date: Jul 13, 2014
Changes:
- Nova 2040 File format update for WAFERMAP
 

Version 3.52
Release date: Jul 03, 2014
Changes:
- Implementation of automatic scaling in 3D Bar Plot
- Bruker AXS File format update for WAFERMAP
 

Version 3.51
Release date: Jun 14, 2014
Changes:
- HRP-250 File format implementation for WAFERMAP
- Nova 2040 File format implementation for WAFERMAP
 

Version 3.50
Release date: May 07, 2014
Changes:
- Scientific format for Plot limits
- Improvements in ploting and copying, more space for plot names
 

Version 3.49
Release date: Febr 02, 2014
Changes:
- GP-Solar File format implementation for PANELMAP
 

Version 3.48
Release date: Sept 05, 2013
Changes:
- New setup of implementation package
 

Version 3.47
Release date: Jul 29, 2013
Changes:
- Parametrized setup for one customer implemented
 

Version 3.46
Release date: Jul 26, 2013
Changes:
- Implementation of Copy To Clipboard function for Remarks
- Bug fix for printing of Remarks
 

Version 3.45
Release date: Jul 2, 2013
Changes:
- Implementation of import filter for Bruker AXS in WAFERMAP
 

Version 3.44
Release date: Apr 5, 2013
Changes:
- Implementation of Bruker AXS import filter
 

Version 3.43
Release date: Febr 12, 2013
Changes:
- Update of ASCII import filter with "Ignore Line"
 

Version 3.42
Release date: Dec 17, 2012
Changes:
- Improvement in "Save As" function
 

Version 3.41
Release date: Oct 29, 2012
Changes:
- Update of Filmetrics import filter
 

Version 3.40
Release date: Sept 17, 2012
Changes:
- Update of KLA Tencor T5 import filter
- Improvements in tool bar
 

Version 3.31
Release date: Aug 14, 2012
Changes:
- Update of "Copy To Clipboard" function
 

Version 3.30
Release date: Febr 27, 2012
Changes:
- Implementation of new WAFERMAP-DemoVersion
 

Version 3.20
Release date: Mar 29, 2011
Changes:
- Legend improved
 

Version 3.16
Release date: Dec 05, 2010
Changes:
- Implementation of new Import for AIT CMT 5000
- New feature to choose size of the Bitmap for "Copy to Clipboard"
- New feature to choose size of the Bitmap for "Save plot to Bitmap"
- Corrections in scaling of plots and pasting of data
 

Version 3.11
Release date: May 15, 2010
Changes:
- Correction of Contour plot for very small values
- Correction of "Save As"
 

Version 3.10
Release date: Jan 22, 2010
Changes:
- Implementation of import function for new Four Dimensions 280 file format
- Implementation of "Save As" for unsaved changes
 

Version 3.9
Release date: Nov 16, 2009
Changes:
- Change of implementation of LCL and UCL in Histogram
 

Version 3.7
Release date: Jul 25, 2009
Changes:
- Implementation of import function for OMT files
 

Version 3.6
Release date: Jun 29, 2009
Changes:
- Update of ASCII Import with polar coordinates
 

Version 3.5.2
Release date: Jun 18, 2009
Changes:
- Update of installation package to solve problems in some Vista environments
- Update of DDE Interface
 

Version 3.5
Release date: Jun 9, 2009
Changes:
- Update of 3D Bar plot for very small user-defined ranges
- Update of Active-X Interface with new documentation
 

Version 3.4
Release date: Mar 8, 2009
Changes:
- Implementation of import function for OMS 3000 files
 

Version 3.3
Release date: Mar 4, 2009
Changes:
- Bug fixes in Plot window max and min
- LCL and UCL for Bar plots
- Update of Network Features
 

Version 3.1
Release date: Nov 8, 2008
Changes:
- Implementation of import function for Sentech files
- Update of RS-100 Import function for multi-measurement files
- Bug fixes in Edit (OK Button after deletion of last site)
- Legend optimisation in case of values below zero
 

Version 3.0
Release date: Sept 24, 2008
Changes:

Title Description Group Type

XML File Format

Implementation of a new WAFERMAP File Format, allowing for multiple data columns, multiple wafers, and extended remarks

Files/ Grids

Improved feature

File loading

Option to load multiple columns and wafers at once

Files/ Grids

New feature

Picture Export

Export of different picture file formats as e.g. jpg and bmp

Export

New feature

HTML-Export

Export of value lists and plots into html-compatible format

Export

New feature

Plot Rotation

Free rotation of 3D plots with mouse

Graphics

New feature

Colors

Color coding of the 2D Contour Plot (colors as for 2D Color Plot)

Graphics

New feature

Contour resolution

2D Contour Plot: Difference between the lines can be entered as absolute values (e.g. 2 Angstrom)

Graphics

Improved feature

Line markers

Line Scan: Set Marker, where measurement sites are crossed by the scan

Graphics

New feature

Difference maps

Operations for complete files (e.g. subtraction of "Stacked Map" from all others)

SPC

New feature

Plot Standards

"Standard" will be split to allow for resetting of single plot options

Options

Improved feature




Version 2.14
Release date: Apr 9, 2008
Changes:
Import:
Two new metrology tools are supported now
- Rigaku
- Philips AMS


Version 2.11
Release date: Apr 20, 2007
Changes:
Active X interface:
- New methods provided


Version 2.10
Release date: Aug 04, 2006
Changes:
Import: Filmetrics file import has been upgraded. The following format versions are supported now in addition:
- Filmetrics File format Version 4
- Filmetrics File format Version 5 including multi-measurement files


Version 2.9
Release date: June 19, 2006
Changes:
Import: Two new metrology tools are supported now:
- Semitek
- Napson WS300


Version 2.8
Release date: Febr 17, 2006
Changes:
Import: Two new metrology tools are supported now:
- KLA -Tencor F5 Ellipsometer
- Rudolph Metapulse


Version 2.7
Release date: Febr 21, 2005
Changes:
Additional features added in the import functionality and the Active-X interface:
- Measurement files of Optiprobe tools with multiple parameter sets and different wafers are supported by WAFERMAP now
- adding of new key word "Points measured:" to the Rudolph file format
- change in file naming for Plasmos imports to allow for Save as
- improvement done for import of very large RS-100 files
- added functionality to the Active-X interface: set and save functions implemented
- improvement in registration functionality for Windows XP users


Version 2.3
Release date: Sept 10, 2003
Changes:
Measurement files of two new metrology tools can be imported and WAFERMAP is released for Windows XP (Prof) now:
- Release for Windows XP Professional
- Import: Two new metrology tools are supported now:
--> QC Solutions SCP 7000 and
--> FILMetrics Version 3
- 3D Plot: Scaling of the plot after setting plot limits was improved
- Printing: Line Scan Legend was improved


Version 2.2
Release date: Aug 16, 2002
Changes:
The following product improvements and minor bug fixes were done:
- Import: Thermaprobe files with multiple measurements supported now
- Communication/ Linking: More ActiveX methods are supported
- Copy to Clipboard: Additional remarks are copied to the clipboard
- Print: Same legend format in Views and printout
- Print: Problem with undefined standard Windows printer and plot servers resolved
- Edit: Problem with Copy/ Paste in empty files resolved
- SPC: Fix of predefined points outside the actual test diameter
- Contour Plot: Fix of problems with very small wafer samples

Version 2.1
Release date: Mar 19, 2002
Changes:
Together with a number of smaller bug fixes there are some other, minor bug fixes and product improvements.
Among them are:
- Print Header/Footer: Listbox appears now
- General Plot Options: Color changes are now accepted
- General Wafer Data: Flat/ Notch problem solved
- 3D Bar plot: problem with colors fixed
- Printouts: now 4 digits after decimal point on printouts
- Network License: Update tool included
- 3D Plot: problem at 300 mm wafers und resolution 1mm fixed

Version 2.0
Release date: Mar 16, 2001
Changes:

Title Description Group Type

SPC-Import

Enable imports in the SPC tool

SPC

New feature

Stacked Maps

Mean of all Files in the Browser

SPC

New feature

Trend Chart

Show histogram for SPC values (Max, Min, Mean, ... of all wafers) on the side

SPC

New feature

Browser Print

Enable printing of the Browser

Print

New feature

Print Logo

Enable inclusion of company logo of the customer in the printouts

Print

New feature

Table Print

Print table of all values and coordinates

Print

New feature

Import Polar

Radius Angle Value - ASCII files import

Import

New feature

3D Bar plot

Implement new 3D bar plot

Graphics

New feature

Graphics of Actual Values

Show numerical values on the wafer as 2D plot (color coded)

Graphics

New feature

Grid Transformation

Transformation of grids (Cartesian, circular) keeping same measurement feature

Files

New feature

Folding of Data; Obsolete Points

Do not delete "unused" measurement data (above 3 sigma, errors, etc.), use flag for distinction

Files

New feature

Merge

Merge data of different files (e.g. two measurements of one wafer)

Files

New feature

Sigma Sorting Filter

Points outside 1, 2, 3 sigma sorting criteria can be eliminated

Files

New feature

Interpolation

Enable "Interpolate Value" in Edit

Files

New feature

Differential Map

Allow for differentiation of maps (1st derivative, 2nd derivative) to show sources of non homogeneity

Analysis

New feature

Faster Algorithms

Improved speed of the algorithms for graphics, especially for high numbers of points

General

Improved feature

Browser legend

Show color scale in browser

SPC

Improved feature

Trend Chart

Improve graphics

SPC

Improved feature

Import Multi wafer Prometrix Files

Prometrix with recognition of multiple files and linesetting

Import

Improved feature

1D Plot Line

Free positioning of the line on the wafer (2 points or point + angle)

Graphics

Improved feature

1D Plot Scal.

Scaleability

Graphics

Improved feature

Histogram Resolution

Implement new algorithm

Graphics

Improved feature

Color Scales

Allow for user specified scales

Graphics

Improved feature

Histogram Scaleable

Scaleability

Graphics

Improved feature

WAFERMAP-Format

Allow for scientific format including larger range of values

Files

Improved feature



Version 1.8
Release date: Jan 17, 2001
Changes:
-Printing: sometimes occuring empty plot windows on printouts corrected
-Files: problems with very tiny wafer diameters resolved (Edit; 2D Plot resolutions)
-DDE: command line commands /SPC and /D implemented for starting SPC and debugging, respectively

Version 1.4
Release date: Jun 18, 2000
Changes:
-Prometrix UV file import: grid corrected

Version 1.3
Release date: Febr 02, 2000
Changes:
-KLA Tencor RS 100 file import: now more robust in case of invalid sites
-Minor bug fixes in 1D Plot and Save As

Version 1.2
Release date: May 17, 1999
Changes:
-Legend added to Copy-to-Clipboard function
New Feature:
-WAFERMAP control through DDE linking added

Version 1.1.1
Release date: Feb 13, 1999
Changes:
-Minor bug fixes
-"n/a" entries in Prometrix UV files are now recognized and according sites are deleted.
New Feature:
-ASCII import added. A simple ASCII text file containing a number of lines in the form: x y value can now be imported. Unit for coordinates is [mm].
Example:
23 -40 100.2
-35 41 101.6
60 -44 101.1
0 -30 99.8
32 12 99.65

Version 1.1.0
Release date: Nov 30, 1998
Changes:
-CDE ResMap import added
-KLA Tencor RS100 import added
-bug at printouts fixed (registered version shows now correct version remark in header and footer
-problem with upper and lower limit in histogram fixed
-improved Rudolph import
-Excel export improved (formatting)
-splash screen at program start can be deactivated

Version 1.0.5
Release date: Sep 30, 1998
Changes:
-Nicolet import improved
-Philips Analytical (Plasmos) import improved (multiple data sets can be imported now)
-3D plot on printouts contains now legend
-scaling of plots possible with upper and lower limit
-limitation of wafer and test diameter decreased from 50mm downto 1mm

Version 1.0.3
Release date: Aug 26, 1998
Changes:
-OPUS file import improved

Version 1.0.2
Release date: Aug 20, 1998
Changes:
-cut and paste feature added in Editor,
-user defined grids: number if grid points can be entered,
-Operations: Error fixed when no parameter was entered,

Version 1.0.0
Release date: Aug 13, 1998

 


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