WAFERMAP Revision History

Version 2.14
Release date: Apr 9, 2008
Changes:
Import:
Two new metrology tools are supported now
- Rigaku
- Philips AMS

Version 2.11
Release date: Apr 20, 2007
Changes:
Active X interface:
- New methods provided

Version 2.10
Release date: Aug 04, 2006
Changes:
Import: Filmetrics file import has been upgraded. The following format versions are supported now in addition:
- Filmetrics File format Version 4
- Filmetrics File format Version 5 including multi-measurement files

Version 2.9
Release date: June 19, 2006
Changes:
Import: Two new metrology tools are supported now:
- Semitek
- Napson WS300

Version 2.8
Release date: Febr 17, 2006
Changes:
Import: Two new metrology tools are supported now:
- KLA -Tencor F5 Ellipsometer
- Rudolph Metapulse

Version 2.7
Release date: Febr 21, 2005
Changes:
Additional features added in the import functionality and the Active-X interface:
- Measurement files of Optiprobe tools with multiple parameter sets and different wafers are supported by WAFERMAP now
- adding of new key word "Points measured:" to the Rudolph file format
- change in file naming for Plasmos imports to allow for Save as
- improvement done for import of very large RS-100 files
- added functionality to the Active-X interface: set and save functions implemented
- improvement in registration functionality for Windows XP users

Version 2.3
Release date: Sept 10, 2003
Changes:
Measurement files of two new metrology tools can be imported and WAFERMAP is released for Windows XP (Prof) now:
- Release for Windows XP Professional
- Import: Two new metrology tools are supported now:
--> QC Solutions SCP 7000 and
--> FILMetrics Version 3
- 3D Plot: Scaling of the plot after setting plot limits was improved
- Printing: Line Scan Legend was improved

Version 2.2
Release date: Aug 16, 2002
Changes:
The following product improvements and minor bug fixes were done:
- Import: Thermaprobe files with multiple measurements supported now
- Communication/ Linking: More ActiveX methods are supported
- Copy to Clipboard: Additional remarks are copied to the clipboard
- Print: Same legend format in Views and printout
- Print: Problem with undefined standard Windows printer and plot servers resolved
- Edit: Problem with Copy/ Paste in empty files resolved
- SPC: Fix of predefined points outside the actual test diameter
- Contour Plot: Fix of problems with very small wafer samples

Version 2.1
Release date: Mar 19, 2002
Changes:
Together with a number of smaller bug fixes there are some other, minor bug fixes and product improvements.
Among them are:
- Print Header/Footer: Listbox appears now
- General Plot Options: Color changes are now accepted
- General Wafer Data: Flat/ Notch problem solved
- 3D Bar plot: problem with colors fixed
- Printouts: now 4 digits after decimal point on printouts
- Network License: Update tool included
- 3D Plot: problem at 300 mm wafers und resolution 1mm fixed

Version 2.0
Release date: Mar 16, 2001
Changes:

Title Description Group Type

SPC-Import

Enable imports in the SPC tool

SPC

New feature

Stacked Maps

Mean of all Files in the Browser

SPC

New feature

Trend Chart

Show histogram for SPC values (Max, Min, Mean, ... of all wafers) on the side

SPC

New feature

Browser Print

Enable printing of the Browser

Print

New feature

Print Logo

Enable inclusion of company logo of the customer in the printouts

Print

New feature

Table Print

Print table of all values and coordinates

Print

New feature

Import Polar

Radius Angle Value - ASCII files import

Import

New feature

3D Bar plot

Implement new 3D bar plot

Graphics

New feature

Graphics of Actual Values

Show numerical values on the wafer as 2D plot (color coded)

Graphics

New feature

Grid Transformation

Transformation of grids (Cartesian, circular) keeping same measurement feature

Files

New feature

Folding of Data; Obsolete Points

Do not delete "unused" measurement data (above 3 sigma, errors, etc.), use flag for distinction

Files

New feature

Merge

Merge data of different files (e.g. two measurements of one wafer)

Files

New feature

Sigma Sorting Filter

Points outside 1, 2, 3 sigma sorting criteria can be eliminated

Files

New feature

Interpolation

Enable "Interpolate Value" in Edit

Files

New feature

Differential Map

Allow for differentiation of maps (1st derivative, 2nd derivative) to show sources of non homogeneity

Analysis

New feature

Faster Algorithms

Improved speed of the algorithms for graphics, especially for high numbers of points

General

Improved feature

Browser legend

Show color scale in browser

SPC

Improved feature

Trend Chart

Improve graphics

SPC

Improved feature

Import Multi wafer Prometrix Files

Prometrix with recognition of multiple files and linesetting

Import

Improved feature

1D Plot Line

Free positioning of the line on the wafer (2 points or point + angle)

Graphics

Improved feature

1D Plot Scal.

Scaleability

Graphics

Improved feature

Histogram Resolution

Implement new algorithm

Graphics

Improved feature

Color Scales

Allow for user specified scales

Graphics

Improved feature

Histogram Scaleable

Scaleability

Graphics

Improved feature

WAFERMAP-Format

Allow for scientific format including larger range of values

Files

Improved feature

Version 1.8
Release date: Jan 17, 2001
Changes:
-Printing: sometimes occuring empty plot windows on printouts corrected
-Files: problems with very tiny wafer diameters resolved (Edit; 2D Plot resolutions)
-DDE: command line commands /SPC and /D implemented for starting SPC and debugging, respectively

Version 1.4
Release date: Jun 18, 2000
Changes:
-Prometrix UV file import: grid corrected

Version 1.3
Release date: Febr 02, 2000
Changes:
-KLA Tencor RS 100 file import: now more robust in case of invalid sites
-Minor bug fixes in 1D Plot and Save As

Version 1.2
Release date: May 17, 1999
Changes:
-Legend added to Copy-to-Clipboard function
New Feature:
-WAFERMAP control through DDE linking added

Version 1.1.1
Release date: Feb 13, 1999
Changes:
-Minor bug fixes
-"n/a" entries in Prometrix UV files are now recognized and according sites are deleted.
New Feature:
-ASCII import added. A simple ASCII text file containing a number of lines in the form: x y value can now be imported. Unit for coordinates is [mm].
Example:
23 -40 100.2
-35 41 101.6
60 -44 101.1
0 -30 99.8
32 12 99.65

Version 1.1.0
Release date: Nov 30, 1998
Changes:
-CDE ResMap import added
-KLA Tencor RS100 import added
-bug at printouts fixed (registered version shows now correct version remark in header and footer
-problem with upper and lower limit in histogram fixed
-improved Rudolph import
-Excel export improved (formatting)
-splash screen at program start can be deactivated

Version 1.0.5
Release date: Sep 30, 1998
Changes:
-Nicolet import improved
-Philips Analytical (Plasmos) import improved (multiple data sets can be imported now)
-3D plot on printouts contains now legend
-scaling of plots possible with upper and lower limit
-limitation of wafer and test diameter decreased from 50mm downto 1mm

Version 1.0.3
Release date: Aug 26, 1998
Changes:
-OPUS file import improved

Version 1.0.2
Release date: Aug 20, 1998
Changes:
-cut and paste feature added in Editor,
-user defined grids: number if grid points can be entered,
-Operations: Error fixed when no parameter was entered,

Version 1.0.0
Release date: Aug 13, 1998